Vacuum-annealed TexSe1-x film

High-crystallinity self-powered detection

Vacuum annealing prevents oxidation and promotes highly oriented crystal growth, enabling a self-powered infrared photodetector with a dark current density of 4.72 × 10⁻⁴ mA cm⁻² and an on/off ratio of 2 × 10³.

Xiyao, Song · Jiaming, Liu · Jingxiang, Wu · Shaoyao, Liu · Wang, Yunpeng · Yi, Fan · 75745869 · Cheng, Ming · Wang, Fei

Materials Science in Semiconductor Processing 2026

Specifications

Dark current density
{'zh': '4.72 × 10⁻⁴', 'en': '4.72 × 10⁻⁴'} mA cm⁻²
On/off current ratio
{'zh': '2 × 10³', 'en': '2 × 10³'}

Advantages

Higher crystallinity

In-situ vacuum annealing effectively prevents oxygen and moisture incorporation, remarkably enhancing crystalline quality and promoting preferred orientation.

Better detection sensitivity

Superior crystallinity and pristine interfaces lead to low dark current density of 4.72 × 10⁻⁴ mA cm⁻² and high on/off ratio of 2 × 10³ under 980 nm illumination.

Self-powered operation

The ITO/ZnO/Te₀.₇Se₀.₃/Au heterojunction photodetector operates in self-powered mode, simplifying system integration.

Applications