28.6 kΩ Low Impedance
A mechanically coupled multi-cantilever design with double-sided actuation that significantly reduces motional impedance while maintaining high Q, suitable for ultra-low-power oscillators.
Haolin, Li · Yang, Qingrui · Yuan, Yi · Shi, Shuai · Niu, Pengfei · Li, Quanning · Chen, Xuejiao · Zhang, Menglun · Pang, Wei
Micromachines 2024
2.5 μm thick AlN film as passive layer
Significantly reduced motional impedance Rm compared to standalone cantilever while maintaining high Q and effective electromechanical coupling coefficient Kt_eff^2