TDTR Nano-Metal Film Thermal Metrology

Simultaneous cross-plane & interface thermal conductance

An improved TDTR technique simultaneously measures cross-plane thermal conductivity and interface thermal conductance, especially for nano-metal films on low thermal diffusivity substrates.

Zeng, Yantao · Li, Lin'an · Wang, Shibin · Sun, Fangyuan · Wang, Zhiyong · Tu, Xinhao · Li, Chuanwei

International Journal of Heat and Mass Transfer 2024

Advantages

Simultaneously measured cross-plane thermal conductivity of Al film, Cr film and SiO2 substrate, and interfacial thermal conductance of Al/Cr and Cr/SiO2 interfaces

Interfacial thermal conductance of Al/Cr interface is much larger than that of Cr/SiO2 interface

Cross-plane thermal conductivity of Al film and Cr film is much smaller than their corresponding bulk value

Uncertainty of measured parameters analyzed by Monte Carlo method and corresponding error range obtained