TaB₂ Diffusion Barrier

Effective Si diffusion blocking

As a diffusion barrier for tantalum-based silicide coatings, TaB₂ more effectively suppresses Si diffusion than uncoated barriers.

Xiao, Lairong · Xu, Jiawei · Zhou, Xiaojun · Zhang, Yafang · Guangzhi, Deng · Shen, Hongtai · Li, Wei · Zhao, Xiaojun · Cai, Zhenyang

Materials 2023

Specifications

扩散层厚度变化率

{'zh': '30.48', 'en': ''} %

Al O

{'zh': '96.5', 'en': '96.5'} wt