Parallel writing 16× faster
Integrating femtosecond laser ablation with two-photon polymerization, this approach fabricates on-chip terahertz surface plasmon polariton waveguides with performance rivaling focused ion beam processing, while reducing excitation region fabrication time by a factor >16.
Jia, Erse · Xie, Chen · Yue, Yang · Ma, Xinyu · Shixian, Sun · Li, Yanfeng · Zhang, Xueqian · Hu, Minglie
Photonics Research 2024
Fabrication time reduced by a factor >16
Sub-wavelength field confinement in SPP waveguides
Performance rivaling FIB-fabricated devices