Femtosecond Laser Hybrid Manufacturing

Parallel writing 16× faster

Integrating femtosecond laser ablation with two-photon polymerization, this approach fabricates on-chip terahertz surface plasmon polariton waveguides with performance rivaling focused ion beam processing, while reducing excitation region fabrication time by a factor >16.

Jia, Erse · Xie, Chen · Yue, Yang · Ma, Xinyu · Shixian, Sun · Li, Yanfeng · Zhang, Xueqian · Hu, Minglie

Photonics Research 2024

Advantages

Fabrication time reduced by a factor >16

Sub-wavelength field confinement in SPP waveguides

Performance rivaling FIB-fabricated devices