Transition-Metal-Assisted Diamond Wafer Grinding

Efficient surface grain removal

Reactive abrasives (Fe, Ti, Ni) convert diamond surface grains into amorphous carbon, enabling rapid removal and nanoscale smoothness.

Zesen, Li · Lu, Jing · Yongkang, Xin · Luo, Qiufa · Li, Chen · Ke, Congming · Xipeng, Xu · Xu, Shuai

Diamond and Related Materials 2024

Advantages

Fe abrasive notably increases removal rate

Achieves nanometer-level surface roughness