Electric-Field-Assisted Nanoimprinted Tilted Nanostructures

Residual-layer-free, high fidelity

Electric-field-driven capillary filling avoids pressure-induced deformation, enabling residual-layer-free, high-fidelity replication of pressure-intolerant tilted nanostructures, resolving the conflict between low-pressure deformation and high-pressure residual layer removal.

Yu, Fan · Wang, Chunhui · Sun, Hao · Li, Shuai · Chen, Xiaoming · Tian, Hongmiao · Li, Xiangming · Chen, Xiaoliang · Shao, Jinyou

Microsystems and Nanoengineering 2026

Advantages

Residual-layer-free

High fidelity