Ti-Co-Ce Getter Film

Low-temperature activation

A getter film activatable at 400 °C via oxygen migration and surface reduction, suitable for vacuum packaging of thermally sensitive devices.

Xiong, Yuhua · Wu, Huating

Materials 2026

Specifications

Activation temperature

{'zh': '400', 'en': '400'} °C

Near-surface reduction depth

{'zh': '0-10', 'en': '0-10'} nm

Phase separation depth

{'zh': '20-30', 'en': '20-30'} nm

Dynamic equilibrium depth

{'zh': '30', 'en': '30'} nm

Advantages

Activatable at 400 °C

Thermal activation at 400 °C is compatible with packaging processes for heat-sensitive devices like MEMS.

No O₂ desorption

No O₂ desorption was detected, so oxygen migrates inward rather than being released into the vacuum.

Mechanism clarified

In situ XPS depth profiling reveals the chemical-state evolution of oxygen at different depths, guiding process optimization.

Applications

• MEMS vacuum packaging：Activates at 400 °C in MEMS packaging to maintain vacuum without thermal damage.
• Vacuum electronic devices：Provides a low-temperature integrable getter for vacuum electronic devices.
• Getter materials：Overcomes low-temperature activation limits of conventional getters.
• Heat-sensitive devices：Meets getter needs under stringent thermal budgets for heat-sensitive devices.