Dual-Pulse Gd Plasma Source

Higher spectral purity

Dual-pulse laser irradiation produces a narrow spectral peak with optimized electron density distribution, better matching multilayer reflection bandwidths.

Wen, Zhilin · Xie, Zhuo · Chaohui, Wang · Qi-Jin, Zhang · Song, Xiaowei · Dou, Yinping · Li, Bochao · Pan, Qikun · Chen, Fei · Zhao, Chongxiao · Lin, Jingquan

Optics Express 2024

Specifications

延迟和

{'zh': '50', 'en': ''} mJ

Advantages

Simulations show flatter density gradient at the ablation front

Lower average electron density in EUV emission region