MEMS Cycloidal Mass Analyzer

High Resolution, High Transmission

Exploits planar stacked architecture and field optimization to achieve perfect ion focusing and efficient separation across a wide mass range.

Wang, Haobin · Han, WANG · Chen, Shen · Sheng, Jie · Xu, Chunjing · Liu, Youjiang · Chen, Chilai

Microsystems and Nanoengineering 2026

Specifications

Resolution
{'zh': '>99', 'en': '>99'}
Ion detection efficiency
{'zh': '>92', 'en': '>92'} %
FWHM
{'zh': '0.03', 'en': '0.03'} Da
FWHM
{'zh': '0.40', 'en': '0.40'} Da
Mass range
{'zh': '2-50', 'en': '2-50'} Da
Electric sector size
{'zh': '32.60 × 41.10 × 6.85', 'en': '32.60 × 41.10 × 6.85'} mm
Electrode pairs
{'zh': '83', 'en': '83'}
Operating vacuum
{'zh': '1 × 10-3', 'en': '1 × 10-3'} Pa

Advantages

High resolution

Optimizing electric sector size and electrode arrangement density suppresses field distortion, yielding resolution above 99 across the m/z range of 2-50 Da.

High transmission

Ion detection efficiency exceeds 92% across the mass range, indicating minimal ion loss and reduced sample demand.

Sharp peaks for light ions

For light ions such as H₂⁺ and He⁺, the FWHM is approximately 0.03 Da, enabling clear separation of closely spaced masses.

Acceptable peaks for heavy ions

For heavier ions like Ar⁺ and CO₂⁺, the FWHM is about 0.40 Da, still providing adequate mass separation.

Applications