Oxidant-free atomic polishing
Dual-function piezoelectric catalysis and mechanical abrasion: in-situ generation of reactive oxygen species oxidizes SiC protrusions into soft SiO₂, which is then mechanically removed to achieve ultra-smooth surfaces.
Hu, Tao · Feng, Jinxi · Yan, Wen · Tian, Shuanghong · Sun, Jingxiang · Liu, Xiaosheng · Wei, Di · Wang, Ziming · Yu, Yang · Lam, Jason Chun Ho · Liu, Shaorong · Wang, Zhong Lin · Xiong, Ya
Small 2023