Uses crystalline or amorphous nanopillars to induce phonon localization resonance and scattering, effectively reducing the thermal conductivity of silicon membranes for flexible control in thermal management.
Yang, Lina · Xu, Yixin · Xianheng, Wang · Zhou, Yanguang
Physical Review Applied 2024
Amorphous Si nanopillars significantly reduce thermal conductivity of the Si membrane
Thermal conductivity increases with pillar mass for crystalline pillars, while remains nearly unchanged for amorphous pillars