Silicon Pressure Sensor

Sensitivity 5.07 mV/V/MPa

Balances high sensitivity and low-cost manufacturing by optimizing membrane roughness.

Shijin, Yan · Lei, Cheng · Wang, Dandan · Yu, Jiangang · Li, Yongwei · Ji, Pengfei · Tan, Qiulin · Liang, Ting

Micromachines 2025

Specifications

灵敏度

{'zh': '5.07', 'en': ''} mV/V/MPa

非线性误差

{'zh': '0.67', 'en': ''} %

迟滞

{'zh': '0.88', 'en': ''} %

重复性

{'zh': '0.75', 'en': ''} %