ppb-level O3
A wafer-scale gas sensor fabricated from commercial ITO glass via laser patterning and plasma treatment, enabling real-time precise monitoring of ppb-level ozone.
Ji, Xiaohua · Meng, Li · Zhang, Ruofan · Deng, Zanhong · Wang, Shimao · Lu, Huadong · Meng, Gang
Nano Letters 2026
Real-time monitoring of O₃ from 25 to 200 ppb
Wafer-scale fabrication with uniform sensing performance
180 °C self-heating