Thinner modified layer at 2.90 μm
Utilizing the optical near-field enhancement effect to transition from nanodeformation to decomposition, avoiding thick modified layers caused by high-fluence ablation, thereby producing thinner and less-defective modified regions.
Chunwei, Wang · Yun, Xialun · Pan, Aifei · Wang, Wenjun · Mei, Xuesong · Panpan, Fan · Xuecheng, Hui · Zhao, Wanqin · Sun, Zheng · Cui, Jianlei
Journal of Manufacturing Processes 2026
Negligible stress-affected areas around the modified layer