Dove Prism Femtosecond Laser Patterning System

0.06 μm bottom roughness

The laser direct writing system employs a Dove prism to optimize pulse movement and overlap distribution, achieving clean removal of metal thin films on glass-ceramic substrates with high precision and low damage.

Li, Chenchen · Yao, Baoli · Li, Ming · Zhang, Chunmin · Xi, Dongxue · Fugang, Wang

Optics and Laser Technology 2024

Specifications

金属薄膜底部粗糙度

{'zh': '0.06', 'en': ''} μm

基板去除深度小于

{'zh': '0.5', 'en': ''} μm

大气环境

{'zh': '1000', 'en': ''} V