Low-density Gd target

45% brighter 6.7 nm EUV

The low-density target reduces plasma self-absorption and low-charge ion yield, significantly boosting 6.7 nm EUV intensity and narrowing the spectral bandwidth.

Yibin, Zhang · Dou, Yinping · Xie, Zhuo · Qi-Jin, Zhang · Wen, Zhilin · Chaohui, Wang · Weihao, Yin · Song, Xiaowei · Gao, Xun · Lin, Jingquan

Vacuum 2024

Specifications

靶的

{'zh': '6.7', 'en': ''} nm EUV

靶的光谱纯度较固体靶提高

{'zh': '74.5', 'en': ''} %

out-of-band radiation reduced

{'zh': '约60', 'en': '~60'} %

Advantages

FWHM reduced to half that of solid target