Si Nanowire Quantum-Dot Transistor

No high-res lithography

In-situ formation of quantum dots in Si nanowires via step-necked constrictions enables single-hole transistors without high-resolution lithography.

Shichang, Fan · Li, Songlin · Huang, Shaoyun · Wang, Junzhuan · Yu, Linwei

ACS Nano 2026

Specifications

Coulomb blockade operating temperature
{'zh': '40', 'en': '40'} K
QD island width
{'zh': '50', 'en': '50'} nm
Tunnel constriction size
{'zh': '10', 'en': '10'} nm

Advantages

No high-res lithography

Interfacial forces stretch the catalytic droplet at sharp convex corners when the nanowire grows across double-steps, naturally forming the quantum dot structure.

Works at 40 K

Quantum confinement in these step-necked constrictions is strong enough to control individual hole transport, with Coulomb blockade oscillations and diamonds persisting up to 40 K.

Scalable process

Batch manufacture of Si-based QD structures at prescribed locations, extremely low-cost and deterministic.

Applications