Anodized ultrathin Ti film

Room-temperature anatase crystallization

Galvanostatic anodization of 50 nm Ti films yields anatase crystallites at room temperature, revealing a fundamentally different oxidation mechanism from thick films.

Li, Wan · Jian, Chen · Li, Xu · Yanyan, Fan · Xu, Xiaolong · Zhang, Zhiyou · Li, Jinjin · Wang, Xueshen

Vacuum 2026

Specifications

Anatase nucleation time

{'zh': '40', 'en': '40'} s

Nucleation depth below oxide surface

{'zh': '4', 'en': '4'} nm

Increase in surface roughness

{'zh': '15', 'en': '15'} fold

Advantages

Room-temperature crystallization

Anatase crystallites are obtained directly by anodization at ambient conditions, eliminating the need for high-temperature annealing and simplifying fabrication of functional oxide films.

High oxide purity

X-ray photoelectron spectroscopy confirms high oxide purity and a surface-dominant Ti4+ state, ensuring a stable and uniform functional oxide.

Applications

• Functional oxide thin-film fabrication：Direct room-temperature anatase crystallization eliminates high-temperature annealing.
• Photocatalytic coatings：High-purity Ti4+ surface state yields photoactive layers.
• Biosensing interfaces：Room-temperature process for biocompatible TiO2 films.
• Electrochemical energy storage electrodes：Stable anatase oxide layer for electrodes.
• Precision functional films：Precise control of thickness, roughness, and crystallization site.