ALD-ZnO Transparent Electrode

Low-cost ITO Alternative

Aluminum-doped ZnO fabricated by spatial ALD, with atomic-level doping control achieving conductivity surpassing commercial ITO.

Jiang, Xuewei · Wang, Qingbo · Geng, Yang · Li, Chenhui · Shan, Bin · Yang, Fan · Chen, Rong

Small 2026

Specifications

方阻

{'zh': '3.3', 'en': ''} Ω sq⁻¹

透光率

{'zh': '90', 'en': ''} %

基板上厚度不均匀性

{'zh': '2.36', 'en': ''} %

大面积组件效率

{'zh': '18.50', 'en': ''} %